The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
Dec. 28, 2018
Applicant:
Jeol Ltd., Tokyo, JP;
Inventors:
Takeshi Otsuka, Tokyo, JP;
Kenichi Yamashita, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20008 (2018.01); H01J 37/28 (2006.01); H01J 37/244 (2006.01); G01N 23/2055 (2018.01); G01N 23/203 (2006.01); G01N 23/207 (2018.01);
U.S. Cl.
CPC ...
G01N 23/20008 (2013.01); G01N 23/203 (2013.01); G01N 23/2055 (2013.01); G01N 23/2076 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); G01N 2223/0566 (2013.01); G01N 2223/079 (2013.01); H01J 2237/24415 (2013.01); H01J 2237/24465 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/2805 (2013.01);
Abstract
A charged particle beam device includes: a plurality of detecting units which detect charged particles diffracted by a specimen; and an intensity pattern information generating unit which generates, based on intensities of a plurality of detection signals output from the plurality of detecting units, intensity pattern information that represents the intensities of the plurality of detection signals as a pattern.