The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 02, 2021

Filed:

Nov. 04, 2016
Applicants:

Tetra Laval Holdings & Finance S.a., Pully, CH;

Keio University, Tokyo, JP;

Inventors:

Tetsuya Suzuki, Yokohama, JP;

Yuya Futagami, Yokohama, JP;

Akira Shirakura, Yokohama, JP;

Kazuya Ono, Tokyo, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/54 (2006.01); C23C 16/26 (2006.01); C23C 16/40 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
C23C 16/545 (2013.01); C23C 16/26 (2013.01); C23C 16/401 (2013.01); C23C 16/50 (2013.01);
Abstract

The aim of the present invention lies in inexpensively providing a thin-film laminated film having excellent barrier properties. A further aim of the present invention lies in providing a method for producing a thin-film laminated film in which a plurality of thin films are coated on a plastic film by means of atmospheric-pressure plasma CVD which has low equipment costs and running costs, and also in providing a thin-film laminated film production apparatus which is able to operate continuously for a long period of time and can produce high-speed coating. A thin film according to the present invention includes a plastic film, a first silicon oxide-based thin film containing silicon oxide as the main component, and a first amorphous carbon-based thin film. The first amorphous carbon-based thin film is formed on the first silicon oxide-based thin film. The first silicon oxide-based thin film has pinholes with a diameter in the range of 10-200 nm.


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