The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2021
Filed:
Feb. 21, 2017
Ebara Corporation, Tokyo, JP;
Taro Takahashi, Tokyo, JP;
Akira Nakamura, Tokyo, JP;
Hiroaki Shibue, Tokyo, JP;
Mitsuo Tada, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
An end-point detection sensordetects an end point of polishing, the end-point detection sensorbeing arranged in a polishing table. The end-point detection sensorhas a pot core. The pot corehas a bottom portion, a magnetic core base portionand a peripheral wall base portion. The end-point detection sensorhas an exciting coil, and a detection coil. The back surfaceof the polishing padhas a spacewhich is arranged at a portion facing the polishing tableand houses a magnetic core extension portionand a peripheral wall extension portion. The magnetic core extension portionand the peripheral wall extension portionextending to the spaceare located in the space