logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10930512 B1

PDFFull Text
Date of Patent:
Feb. 23, 2021

Filed:

Mar. 23, 2018

Method of processing workpiece

Applicant:

Disco Corporation;

Inventor:

Kenji Takenouchi, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain, Ltd.

Primary Examiner:

Duy T Nguyen

Assistant Examiner:

Dilinh P Nguyen

Int. Cl.
CPC ...
H01L 21/46 (2006.01); H01L 21/78 (2006.01); H01L 21/44 (2006.01); H01L 21/48 (2006.01); H01L 21/304 (2006.01); H01L 23/544 (2006.01); B28D 5/02 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01L 21/56 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3043 (2013.01); B28D 5/022 (2013.01); H01L 21/67092 (2013.01); H01L 21/6836 (2013.01); H01L 21/68785 (2013.01); H01L 21/78 (2013.01); H01L 23/544 (2013.01); H01L 21/56 (2013.01); H01L 22/34 (2013.01); H01L 2221/6835 (2013.01); H01L 2221/68327 (2013.01); H01L 2223/54426 (2013.01); H01L 2223/54486 (2013.01);
Abstract

A method of processing a plate-shaped workpiece that includes layered bodies containing metal which are formed in superposed relation to projected dicing lines, includes the steps of holding the workpiece on a holding table, and thereafter, cutting the workpiece along the projected dicing lines with an annular cutting blade, thereby separating the layered bodies. The cutting blade has a groove defined in a face side or a reverse side of an outer peripheral portion thereof that cuts into the workpiece in the step of cutting the workpiece. The step of cutting the workpiece includes the step of cutting the workpiece while supplying a cutting fluid containing an organic acid and an oxidizing agent to the workpiece.

Find Patent Forward Citations

Loading…