The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Apr. 15, 2019
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Inventors:
Yu-Hsuan Yang, Taichung, TW;
Wen Han Hung, Hsinchu, TW;
Tzy-Kuang Lee, Hsinchu, TW;
Chia Ying Lin, Taichung, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/762 (2006.01); H01L 21/027 (2006.01); H01L 21/266 (2006.01); H01L 29/40 (2006.01); H01L 29/808 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0274 (2013.01); H01L 21/266 (2013.01); H01L 21/76224 (2013.01); H01L 21/76229 (2013.01); H01L 29/0649 (2013.01); H01L 29/402 (2013.01); H01L 29/6659 (2013.01); H01L 29/808 (2013.01);
Abstract
A semiconductor device includes a semiconductor substrate, a plurality of isolation structures on the semiconductor substrate, and a plurality of blocking structures disposed directly over the isolation structures. The blocking structures have a lower reflectivity than the isolation structures.