The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 23, 2021

Filed:

Jan. 23, 2018
Applicant:

X-fab Semiconductor Foundries Gmbh, Erfurt, DE;

Inventor:

Ralf Lerner, Erfurt, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/02 (2006.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 29/267 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02488 (2013.01); H01L 21/02505 (2013.01); H01L 21/76251 (2013.01); H01L 29/0649 (2013.01); H01L 29/267 (2013.01);
Abstract

A method for producing a semiconductor substrate and a semiconductor substrate for use in epitaxial methods of a semiconductor material are described. The semiconductor substrate includes a support slice, an intermediate layer situated on the support slice, and an active layer situated on the intermediate layer. The intermediate layer includes a material which has a reduced viscosity or flows when the semiconductor substrate is used in an epitaxial method in order to enable at least a partial adaptation of a crystal lattice of the active layer to a crystal lattice of the semiconductor material at the transition between the active layer and the semiconductor material.


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