The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2021
Filed:
Apr. 29, 2019
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Gerardo A. Brucker, Longmont, CO (US);
Timothy C. Swinney, Fort Collins, CO (US);
Clinton L. Percy, Windsor, CO (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01L 21/34 (2006.01); H01J 41/06 (2006.01);
U.S. Cl.
CPC ...
G01L 21/34 (2013.01); H01J 41/06 (2013.01);
Abstract
A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.