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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10923333 B1

PDFFull Text
Date of Patent:
Feb. 16, 2021

Filed:

Jul. 26, 2019

Substrate processing apparatus and substrate processing control method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Kenji Matsumoto, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Rothwell, Figg, Ernst & Manbeck, P.C

Primary Examiner:

Brian Turner

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01L 21/3065 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32642 (2013.01); H01J 37/32724 (2013.01); H01L 21/67069 (2013.01); H01L 21/6833 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/24578 (2013.01); H01J 2237/334 (2013.01);
Abstract

A substrate processing apparatus includes a first mounting unit, a second mounting unit and an adjusting unit. The first mounting unit is configured to mount thereon a target substrate to be processed that is a plasma processing target. The second mounting unit is disposed to surround the first mounting unit to mount thereon a focus ring. The adjusting unit is configured to adjust a height of a peripheral portion of the target substrate with respect to a height of a central portion of the target substrate in response to consumption of the focus ring.

Find Patent Forward Citations

Matsumoto, Kenji. (2021). Substrate processing apparatus and substrate processing control method (U.S. Patent No. 10923333). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10923333

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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