The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2021
Filed:
Sep. 05, 2017
Applicant:
Focus-ebeam Technology (Beijing) Co., Ltd., Beijing, CN;
Assignees:
FOCUS-EBEAM TECHNOLOGY (BEIJING) CO., LTD., Beijing, CN;
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/141 (2006.01); H01J 37/24 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/141 (2013.01); H01J 37/24 (2013.01); H01J 37/241 (2013.01); H01J 37/26 (2013.01); H01J 2237/141 (2013.01); H01J 2237/1415 (2013.01); H01J 2237/152 (2013.01);
Abstract
A magnetic lens is disclosed, which includes: a magnetic yoke, an exciting coil and a power supply controlling system. The magnetic yoke is at outside of the exciting coil and surrounds the coil; the exciting coil is made up of litz wires; the power supply controlling system is arranged to supply power to the exciting coil and control the flow directions and magnitudes of the currents in the exciting coil. A method for controlling the magnetic lens is also disclosed.