The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 09, 2021

Filed:

Sep. 10, 2018
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

SeungHan Woo, Seoul, KR;

Je Min Ryu, Seoul, KR;

Reum Oh, Hwaseong-si, KR;

Moonhee Oh, Osan-si, KR;

BumSuk Lee, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/065 (2006.01); H01L 23/48 (2006.01); H01L 25/18 (2006.01); H01L 23/00 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
H01L 25/0657 (2013.01); G01R 31/2853 (2013.01); H01L 23/481 (2013.01); H01L 24/16 (2013.01); H01L 25/18 (2013.01); H01L 2224/16146 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06541 (2013.01); H01L 2225/06596 (2013.01);
Abstract

A semiconductor die may include a first delay circuit formed on a substrate and configured to delay a test signal, the first delay circuit including first delay stages connected in series, a second delay circuit formed on the substrate and configured to delay the test signal, the second delay circuit including second delay stages connected in series, at least one through silicon via connected to at least one output terminal of output terminals of the first delay stages, the at least one through silicon via penetrating through the substrate, and a load determinator configured to compare a first delay signal output from one of the first delay stages with a second delay signal output from one of the second delay stages and determine a load of the at least one through silicon via.


Find Patent Forward Citations

Loading…