The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Feb. 27, 2020
Tokyo Electron Limited, Tokyo, JP;
Seiji Nakano, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An apparatus includes first load portsA andB and second load portsC andD provided in a left-right direction; a processing unit Dan inspection moduleprovided between the first load portsA andB and the second load portsC andD; a first substrate transfer mechanismA provided at one side of the inspection modulein the left-right direction, and configured to transfer a substrate W into the processing unit Dand a transfer container C on the first load portsA andB; a second substrate transfer mechanismB provided at the other side thereof, and configured to transfer the substrate W into the inspection moduleand a transfer container C on the second load portsC andD; and a transit unitfor transferring the substrate W between the first and the second substrate transfer mechanismsA andB.