The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Jul. 31, 2019
Disco Corporation, Tokyo, JP;
Shinichi Namioka, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A holding table for holding a wafer includes plural pins, and a wafer holding surface includes the tips of the plural pins. Therefore, small dust enters between the pins and thus is less readily left between the wafer holding surface and the wafer. Therefore, when the wafer is sucked and held, a gap is less readily made between the wafer holding surface and the wafer. Thus, the occurrence of the situation in which the wafer is held in a waving state is suppressed. For this reason, when a liquid resin is pushed to spread over the lower surface of the wafer, an air bubble enters less readily between the liquid resin and the wafer. This can suppress entry of the air bubble in a protective member obtained by curing the liquid resin.