The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2021
Filed:
Jan. 24, 2019
Versum Materials Us, Llc, Tempe, AZ (US);
Matthew David Bernard, Tempe, AZ (US);
Wayne Thomas McDermott, Tempe, AZ (US);
Allison Barbeau Hopkins, Tempe, AZ (US);
Joseph J. Siemer, Tempe, AZ (US);
Michael Altschul Pingitore, Tempe, AZ (US);
Versum Materials US, LLC, Tempe, AZ (US);
Abstract
Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring only one manual connection/disconnection step of the ampoule to the apparatus. The testing includes analyses for residual moisture, entrained particulate matter, differential pressure, and helium leak checking.