The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 09, 2021

Filed:

Oct. 16, 2018
Applicant:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

Inventors:

Shuichi Miyao, Niigata, JP;

Masahiko Ishida, Niigata, JP;

Naruhiro Hoshino, Niigata, JP;

Shigeyoshi Netsu, Niigata, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 15/00 (2006.01); C30B 29/06 (2006.01); C01B 33/035 (2006.01); C01B 33/037 (2006.01); C30B 13/34 (2006.01); C30B 15/36 (2006.01); C30B 25/00 (2006.01); C30B 29/60 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
C30B 29/06 (2013.01); C01B 33/035 (2013.01); C01B 33/037 (2013.01); C30B 13/34 (2013.01); C30B 15/36 (2013.01); C30B 25/00 (2013.01); C30B 29/605 (2013.01); C30B 35/007 (2013.01);
Abstract

The present invention provides polycrystalline silicon suitably used as a raw material for producing single crystal silicon. The polycrystalline silicon rod of the present invention is a polycrystalline silicon rod grown by chemical vapor deposition performed under a pressure of 0.3 MPaG or more, wherein when a plate-shaped sample piece collected from an arbitrary portion of the polycrystalline silicon rod is observed with a microscope with a temperature increased from a temperature lower than a melting point of silicon up to a temperature exceeding the melting point of silicon, a heterogeneous crystal region, which is a crystal region including a plurality of crystal grains heterogeneously assembled and including no needle-like crystal, having a diameter exceeding 10 μm is not observed.


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