The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Nov. 12, 2018
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 47/90 (2006.01); B25J 9/16 (2006.01); H01L 21/67 (2006.01); B65G 1/137 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67724 (2013.01); B25J 9/1694 (2013.01); B65G 47/90 (2013.01); H01L 21/6773 (2013.01); H01L 21/67276 (2013.01); H01L 21/67294 (2013.01); H01L 21/67727 (2013.01); H01L 21/67733 (2013.01); H01L 21/67781 (2013.01); B65G 1/137 (2013.01); B65G 2201/0297 (2013.01);
Abstract
In an embodiment a system includes: a wafer store comprising a wafer configured for processing by a semiconductor processing tool; a cart configured to transport the wafer from the wafer store along a predetermined path; a robotic arm, the robotic arm configured to: read wafer data from the wafer store, transport the wafer from the wafer store to the cart, send the wafer data to the cart, wherein the cart is configured to transport the wafer to a location in response to the wafer data.