The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 02, 2021

Filed:

Jul. 26, 2019
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;

Inventors:

Koichiro Tanaka, Atsugi, JP;

Hidekazu Miyairi, Atsugi, JP;

Aiko Shiga, Atsugi, JP;

Akihisa Shimomura, Atsugi, JP;

Atsuo Isobe, Atsugi, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/283 (2006.01); B23K 26/352 (2014.01); B23K 26/06 (2014.01); B23K 26/073 (2006.01); H01L 27/12 (2006.01); H01L 21/268 (2006.01); B23K 101/40 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02675 (2013.01); B23K 26/0604 (2013.01); B23K 26/0608 (2013.01); B23K 26/0732 (2013.01); B23K 26/0736 (2013.01); B23K 26/0738 (2013.01); B23K 26/352 (2015.10); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/268 (2013.01); H01L 21/283 (2013.01); H01L 27/1285 (2013.01); H01L 27/1296 (2013.01); B23K 2101/40 (2018.08); H01L 27/14625 (2013.01);
Abstract

The present invention is characterized in that by laser beam being slantly incident to the convex lens, an aberration such as astigmatism or the like is occurred, and the shape of the laser beam is made linear on the irradiation surface or in its neighborhood. Since the present invention has a very simple configuration, the optical adjustment is easier, and the device becomes compact in size. Furthermore, since the beam is slantly incident with respect to the irradiated body, the return beam can be prevented.


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