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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10908502 B1

PDFFull Text
Date of Patent:
Feb. 02, 2021

Filed:

Oct. 01, 2018

Resist composition, method of forming resist pattern, polymeric compound, and compound

Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Inventors:

Masatoshi Arai, Kawasaki, JP;

Takuya Ikeda, Kawasaki, JP;

Koshi Onishi, Kawasaki, JP;

Assignee:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;

Attorney:

Knobbe Martens Olson & Bear, LLP

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/16 (2006.01); C08F 220/38 (2006.01); C07D 409/04 (2006.01); C07D 307/42 (2006.01); C07D 333/22 (2006.01); C08F 220/28 (2006.01); G03F 7/20 (2006.01); G03F 7/38 (2006.01); G03F 7/32 (2006.01); G03F 7/039 (2006.01); C08F 220/22 (2006.01);
U.S. Cl.
CPC ...
G03F 7/038 (2013.01); C07D 307/42 (2013.01); C07D 333/22 (2013.01); C07D 409/04 (2013.01); C08F 220/22 (2013.01); C08F 220/28 (2013.01); C08F 220/38 (2013.01); G03F 7/039 (2013.01); G03F 7/0397 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/2037 (2013.01); G03F 7/322 (2013.01); G03F 7/38 (2013.01); C08F 220/282 (2020.02); C08F 220/283 (2020.02); C08F 220/382 (2020.02); C08F 2800/20 (2013.01);
Abstract

A resist composition including a resin component having a structural unit derived from a compound represented by formula (a0-1), in which W represents a polymerizable group-containing group; Rarepresents an alkyl group or an aromatic heterocyclic group containing an oxygen atom or a sulfur atom; in the case where Rais an aromatic heterocyclic group containing an oxygen atom or a sulfur atom, Rais a group which forms an aliphatic cyclic group containing an electron-withdrawing group, together with the tertiary carbon atom (*C) to which Rais bonded; and when Rais an alkyl group, Rais a group in which an aliphatic cyclic group containing an electron-withdrawing group forms a condensed ring together with an aromatic heterocyclic group containing an oxygen atom or a sulfur atom.

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