The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 2021
Filed:
Jul. 03, 2019
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., North Kingstown, RI (US);
Inventors:
James McDonough, Gilbert, AZ (US);
Saul Alvarado, Tempe, AZ (US);
Assignee:
FUJIFILM ELECTRONIC MATERIALS U.S.A., INC., North Kingstown, RI (US);
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/306 (2006.01); H01L 21/321 (2006.01); C09G 1/04 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09G 1/04 (2013.01); H01L 21/30625 (2013.01); H01L 21/3212 (2013.01);
Abstract
Chemical mechanical polishing compositions include an abrasive, a first removal rate enhancer; and water; wherein the polishing compositions have a value of less than 800,000 for the relation: large particle counts/weight percent abrasive, when measured using a 0.2 μm bin size.