The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Nov. 23, 2018
Tokyo Electron Limited, Tokyo, JP;
Kippei Sugita, Miyagi, JP;
Daisuke Kawano, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A measuring device includes sensor electrodes provided along a periphery of a base substrate such that a sum A of shortest distances from the sensor electrodes to an inner peripheral surface of a focus ring becomes a constant value, the sum A satisfying the number of the sensor electrodes, C: measurement values and 'a': constant). A method of obtaining the amount of deviation of the central position of the measuring device in a region surrounded by the focus ring from the center of the region, includes: calculating the measurement values Cusing the measuring device; calculating the constant 'a' using the measurement values C; calculating distances from the sensor electrodes to the inner peripheral surface of the focus ring using the constant “a” and the measurement values C; and calculating the amount of deviation of the central position of the measuring device based on the calculated distances.