The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Jul. 30, 2019
Kokusai Electric Corporation, Tokyo, JP;
Akihiko Yoneda, Toyama, JP;
Kazuhide Asai, Toyama, JP;
Tetsuyuki Maeda, Toyama, JP;
Naoya Miyashita, Toyama, JP;
Nobuyuki Miyakawa, Toyama, JP;
Tadashi Okazaki, Toyama, JP;
Hideo Yanase, Toyama, JP;
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Abstract
There is provided a technique that includes a first controller configured to acquire event data generated at a time of transferring a substrate and alarm data generated at a time of occurrence of a transfer error, a recorder configured to, while recording a transfer operation of the substrate as first image data, record the transfer operation of the substrate as second image data having a higher resolution than the first image data, a second controller configured to store the first image data in a first memory based on the event data, and store the second image data in a second memory based on the alarm data, and an operating controller configured to display at least the first image data and the second image data. The second controller displays both the first image data and the second image data on a same screen.