The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 2021
Filed:
Oct. 03, 2019
Applicant:
Technische Universiteit Delft, Delft, NL;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01); H01J 37/141 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/141 (2013.01); H01J 37/20 (2013.01); H01J 37/224 (2013.01); H01J 37/26 (2013.01); H01J 37/28 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/24455 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/2808 (2013.01);
Abstract
Disclosed is an apparatus and method for inspecting a sample. The apparatus includes:
Kruit, Pieter. (2021). Apparatus and method for inspecting a sample using a plurality of charged particle beams (U.S. Patent No. 10903042). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10903042
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile