The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Aug. 02, 2019
Applicant:
Carl Zeiss Multisem Gmbh, Oberkochen, DE;
Inventors:
Christoph Riedesel, Aalen, DE;
Dirk Zeidler, Oberkochen, DE;
Assignee:
Carl Zeiss MultiSEM GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/09 (2006.01); H01J 37/10 (2006.01); H01J 37/147 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/09 (2013.01); H01J 37/10 (2013.01); H01J 37/147 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/0044 (2013.01); H01J 2237/1536 (2013.01);
Abstract
A charged particle beam system includes a charged particle source, a multi beam generator, an objective lens, a projection system, and a detector system. The projection system includes a first subcomponent configured to provide low frequency adjustments, and the projection system comprises a second subcomponent configured to provide a high frequency adjustments.