The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
May. 25, 2018
Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;
Guodong Cong, Shanghai, CN;
Zhilong Li, Shanghai, CN;
Yaqing Huang, Shanghai, CN;
Wenbo Zhao, Shanghai, CN;
Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;
Abstract
A shifting-in/out mechanism includes a connecting block, flat spring made of two segments connected by a hinge, spring deflection assembly and wheel assembly. One segment of the flat spring is connected to the wheel assembly and the other is mounted, by the connecting block, on an object to be moved. The spring deflection assembly provides a driving force for deflecting the segment of the flat spring connected to the wheel assembly toward a movement supporting surface. A shifting-in/out device for a workpiece stage of a photoetching machine includes a bottom frame, air spring, air-cushion device and plurality of the mechanisms arranged on a lower or side surfaces of the bottom frame. In the mechanism, the flat spring has two segments hinged together. All locations of the flat spring that are stressed to cause deflection of the flat spring are substantially on a single line.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile