The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Oct. 26, 2017
Mitsui Chemicals, Inc., Tokyo, JP;
Tazmo Co., Ltd., Okayama, JP;
Kazuo Kohmura, Chiba, JP;
Daiki Taneichi, Otake, JP;
Yosuke Ono, Sodegaura, JP;
Hisako Ishikawa, Ichihara, JP;
Tsuneaki Biyajima, Otake, JP;
Yasuyuki Sato, Ibara, JP;
Toshiaki Hirota, Ibara, JP;
MITSUI CHEMICALS, INC., Tokyo, JP;
TAZMO CO., LTD., Okayama, JP;
Abstract
A method for producing a pellicle according to the one embodiment of the present invention produces a pellicle including a pellicle film and a pellicle frame supporting an outer peripheral portion of the pellicle film. The method includes forming the pellicle film on a substrate, and bonding a pressure-sensitive adhesive sheet, that is elastic and has a pressure-sensitive adhesive force thereof decreased upon receipt of external stimulation, to each of two surfaces of the substrate; making a notch inside a part of the substrate, the part having the pressure-sensitive adhesive sheets bonded thereto; separating a substrate outer peripheral portion outer to the notch of the substrate, in a state where the pressure-sensitive adhesive sheets are bonded to the substrate, to form a pellicle frame; and stimulating the pressure-sensitive adhesive sheets to peel off the pressure-sensitive adhesive sheets.