The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 2021
Filed:
Mar. 06, 2017
Applicant:
Sumco Corporation, Tokyo, JP;
Inventors:
Assignee:
SUMCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/956 (2006.01); H01L 23/544 (2006.01); G01N 21/95 (2006.01); G01N 1/28 (2006.01); G01Q 80/00 (2010.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
G01N 21/956 (2013.01); G01N 1/28 (2013.01); G01N 21/9501 (2013.01); G01Q 80/00 (2013.01); H01L 21/02052 (2013.01); H01L 23/544 (2013.01); H01L 2223/54453 (2013.01);
Abstract
Provided is a method of preparing a sample surface on which a marking is formed, wherein the marking is a local oxide film locally formed on the sample surface, the local oxide film is formed by applying voltage between a probe and the sample surface while a tip of the probe is in contact with the sample surface, and the probe is brought into contact with the sample surface after moisture supply.