The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 19, 2021

Filed:

Oct. 17, 2018
Applicant:

Entegris, Inc., Billerica, MA (US);

Inventors:

Bryan C. Hendrix, Danbury, CT (US);

Scott L. Battle, Cedar Park, TX (US);

John N. Gregg, Marble Falls, TX (US);

Assignee:

ENTEGRIS, INC., Billerica, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); F17C 7/04 (2006.01); F28D 21/00 (2006.01);
U.S. Cl.
CPC ...
F17C 7/04 (2013.01); C23C 16/4485 (2013.01); F28D 21/00 (2013.01); F28D 2021/0064 (2013.01);
Abstract

The invention is directed to a vaporizer or ampoule assembly with improved heat transfer between a vaporizer vessel body and at least one support tray located therein. In particular, there is provided a heat transfer enhancing member that is disposed between a vessel body and support tray. In one example of a heat transfer enhancing member or assembly there is included a heat conductive mesh or liner around totally or partially around the support tray that is wedged in between the support tray and the interior diameter or wall of the vessel body. In a related embodiment, the heat transfer enhancing member includes an expandable support tray sidewall to increase physical contact between the support tray and the vessel body interior wall.


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