The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 12, 2021

Filed:

May. 22, 2019
Applicant:

Winbond Electronics Corp., Taichung, TW;

Inventors:

Huang-Nan Chen, Taichung, TW;

Ming-Chih Hsu, Taichung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/94 (2006.01); H01L 31/062 (2012.01); H01L 29/06 (2006.01); H01L 21/033 (2006.01); H01L 21/762 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0653 (2013.01); H01L 21/0337 (2013.01); H01L 21/762 (2013.01); H01L 27/10823 (2013.01); H01L 27/10891 (2013.01);
Abstract

A buried word line structure including a substrate, an isolation structure, and a buried word line is provided. The isolation structure is located in the substrate to define active regions separated from each other. The active regions extend in a first direction. The buried word line is located in the substrate. The buried word line extends through the isolation structure and the active regions in a second direction. The first direction intersects the second direction. The buried word line and the substrate are isolated from each other. The same buried word line includes a first portion and a second portion. The first portion is located in the active regions. The second portion is located in the isolation structure between two adjacent active regions in the first direction. A width of the first portion is greater than a width of the second portion.


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