The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Dec. 16, 2016
Azbil Corporation, Chiyoda-ku, JP;
Yuki Seto, Chiyoda-ku, JP;
Rina Ogasawara, Chiyoda-ku, JP;
Azbil Corporation, Chiyoda-ku, JP;
Abstract
A pressure sensor () includes a diaphragm (); a semiconductor chip () that includes a plurality of resistors (Rto R) constituting a strain gauge and that has a square shape in plan view; four first structures (to) each having one end joined to a region of the second main surface of the diaphragm that is deformed when a pressure is applied to a first main surface (A) of the diaphragm and having other ends respectively connected to four corners of the semiconductor chip, the first structures extend downward to a second main surface (B); and a second structure () having one end joined to a center () of the diaphragm on the second main surface in plan view and having the other end joined to a center () of the semiconductor chip in plan view, the second structure extending downward to the second main surface.