The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2021
Filed:
Feb. 25, 2019
Disco Corporation, Tokyo, JP;
Satoshi Arai, Tokyo, JP;
Jun Saito, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A constant temperature water supply apparatus includes a temperature adjustment unit that circulates cooling water and adjusts the temperature of a spindle unit of a processing apparatus and a processing water temperature adjustment unit. The temperature adjustment unit includes a pump that sends the cooling water to the spindle unit, a cooling water cooling unit, a first pipe that connects the pump and the cooling unit, a second pipe that connects the cooling unit and the spindle unit, and a third pipe that connects the spindle unit and the pump. The processing water temperature adjustment unit includes a processing water pipe that has one end connected to a water source and supplies processing water from the other end side to a processing tool and a heat exchange unit on the processing water pipe.