The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Nov. 17, 2016
Applicant:
Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;
Inventors:
Shao-Yu Li, Hsinchu, TW;
Hao-chieh Chan, Hsinchu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 27/06 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01); G01R 31/3185 (2006.01);
U.S. Cl.
CPC ...
H01L 22/22 (2013.01); G01R 31/2637 (2013.01); G01R 31/2644 (2013.01); G01R 31/2884 (2013.01); H01L 22/14 (2013.01); H01L 22/34 (2013.01); H01L 27/0688 (2013.01); G01R 31/318513 (2013.01);
Abstract
A stacked semiconductor arrangement is provided. The stacked semiconductor arrangement includes a dynamic pattern generator layer having an electrical component. The arrangement also includes a monitoring layer configured to evaluate electrical performance of the electrical component.