The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 05, 2021

Filed:

Jan. 28, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jin-hwan Chun, Seongnam-si, KR;

Hui-jung Kim, Seongnam-si, KR;

Keun-nam Kim, Yongin-si, KR;

Sung-hee Han, Hwaseong-si, KR;

Yoo-sang Hwang, Suwon-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/762 (2006.01); H01L 21/764 (2006.01); H01L 29/06 (2006.01); H01L 27/108 (2006.01);
U.S. Cl.
CPC ...
H01L 21/7682 (2013.01); H01L 21/764 (2013.01); H01L 21/76224 (2013.01); H01L 27/10885 (2013.01); H01L 27/10888 (2013.01); H01L 27/10891 (2013.01); H01L 29/0649 (2013.01);
Abstract

A semiconductor device includes: a substrate having active regions defined by a device isolation region; a conductive line extending in a direction on the active regions; insulating liners on both sidewalls of a lower portion of the conductive line that contacts with the active regions; spacers that are apart from the insulating liners in a direction perpendicular to a surface of the substrate and sequentially formed on both sidewalls of an upper portion of the conductive line; a blocking layer arranged at a spacing between a spacer located in the middle of the spacers and the insulating liners and in a recess portion recessed from one end of the spacer located in the middle of the spacers toward the conductive line; and conductive patterns arranged on the active regions on both sides of the spacers.


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