The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Feb. 16, 2017
Rigaku Corporation, Akishima, JP;
Seiji Fujimura, Takatsuki, JP;
Yu Aoki, Takatsuki, JP;
Rigaku Corporation, Akishima, JP;
Abstract
A simultaneous multi-elements analysis type X-ray fluorescence spectrometer according to the present invention includes: a sample table () on which a sample () is placed and a conveyance arm () for the sample (). The sample table () has a cutout () formed therein, through which the conveyance arm () is allowed to pass in a vertical direction. Regarding respective measurement points (Pn) on a blank wafer (1), a background correction unit () previously stores, as background intensities at the measurement points (Pn), intensities obtained by subtracting a measured intensity at a reference measurement point (P) located above the cutout () from each of measured intensities at the measurement points (Pn), and regarding respective measurement points (Pn) on an analytical sample (1), the background correction unit () subtracts the background intensities at the measurement points (Pn) from measured intensities at the measurement points (Pn), thereby correcting background.