The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Oct. 23, 2017
Applicant:
Koh Young Technology Inc., Seoul, KR;
Inventors:
Jung Hur, Bucheon-si, KR;
Woo Jae Choi, Yongin-si, KR;
Assignee:
KOH YOUNG TECHNOLOGY INC., Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/25 (2006.01); G01N 21/95 (2006.01); G01N 21/88 (2006.01); H01L 21/66 (2006.01); H04N 5/372 (2011.01); G02B 30/00 (2020.01); G02B 27/09 (2006.01); G02B 27/20 (2006.01);
U.S. Cl.
CPC ...
G01B 11/254 (2013.01); G01B 11/2513 (2013.01); G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G02B 30/00 (2020.01); H01L 22/12 (2013.01); H04N 5/372 (2013.01); G02B 27/0927 (2013.01); G02B 27/20 (2013.01);
Abstract
Disclosed are a pattern light irradiating device and an inspection apparatus using the same. The pattern light irradiating device includes first and second pattern light sources installed on a frame having a plurality of through-holes. Each of the through-holes is formed along a single optical axis. The first pattern light source is configured to irradiate first pattern light having a fixed pitch. The second pattern light source is configured to irradiate second pattern light having a variable pitch.