The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2021
Filed:
Jan. 26, 2018
Applicant:
Atotech Deutschland Gmbh, Berlin, DE;
Inventors:
Rangarajan Jagannathan, Berlin, DE;
James Adolf, Berlin, DE;
Jun Wu, Berlin, DE;
Lars Kohlmann, Berlin, DE;
Heiko Brunner, Berlin, DE;
Assignee:
Atotech Deutschland GmbH, Berlin, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C07D 401/12 (2006.01); C25D 3/38 (2006.01); C25D 3/58 (2006.01); C25D 7/12 (2006.01);
U.S. Cl.
CPC ...
C07D 401/12 (2013.01); C25D 3/38 (2013.01); C25D 3/58 (2013.01); C25D 7/123 (2013.01);
Abstract
The present invention concerns pyridinium compounds, a synthesis method for their preparation, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths. The plating baths are particularly suitable for use in filling of recessed structures in the electronics and semiconductor industry including dual damascene applications.