The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 29, 2020

Filed:

Aug. 09, 2019
Applicants:

International Business Machines Corporation, Armonk, NY (US);

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Su Chen Fan, Cohoes, NY (US);

Andre P. Labonte, Mechanicville, NY (US);

Lars W. Liebmann, Poughquag, NY (US);

Sanjay C. Mehta, Niskayuna, NY (US);

Assignees:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/768 (2006.01); H01L 21/027 (2006.01); H01L 23/535 (2006.01); H01L 27/11 (2006.01); H01L 21/311 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66553 (2013.01); H01L 21/0274 (2013.01); H01L 21/31111 (2013.01); H01L 21/7684 (2013.01); H01L 21/76802 (2013.01); H01L 21/76805 (2013.01); H01L 21/76877 (2013.01); H01L 21/76895 (2013.01); H01L 21/76897 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/535 (2013.01); H01L 27/1104 (2013.01); H01L 29/665 (2013.01); H01L 29/6656 (2013.01); H01L 29/66515 (2013.01); H01L 29/66545 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A gate tie-down structure includes a gate structure including a gate conductor and gate spacers and inner spacers formed on the gate spacers. Trench contacts are formed on sides of the gate structure. An interlevel dielectric (ILD) has a thickness formed over the gate structure. A horizontal connection is formed within the thickness of the ILD over an active area connecting the gate conductor and one of the trench contacts over one of the inner spacers.


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