The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Mar. 14, 2016
Fuji Corporation, Chiryu, JP;
Takahiro Jindo, Anjo, JP;
Toshiyuki Ikedo, Nagoya, JP;
FUJI CORPORATION, Chiryu, JP;
Abstract
In a plasma generator, a reaction chamber is divided into a pair of insertion portions, for inserting a pair of electrodes, and a connecting segment that connects the pair of insertion portions. The connecting segment is narrower than the pair of insertion portions. Since the connecting segment is narrower than the insertion portions, the volume of the connecting segment is small. Accordingly, the process gas having a small volume is converted into plasma over the entire region of the connecting segment and along the wall surfaces that are continuous from each insertion portion to the connecting segment, thereby enabling the process gas to be converted to plasma efficiently. Further, the junctures of each of the pair of insertion portions and the connecting segment are smooth surfaces. As a result, heat from discharging is dispersed over the entire smooth surface, thereby suppressing carbonization from discharging.