The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Apr. 27, 2016
Hitachi High-tech Corporation, Tokyo, JP;
Natsuki Tsuno, Tokyo, JP;
Naomasa Suzuki, Tokyo, JP;
Atsushi Okita, Tokyo, JP;
Muneyuki Fukuda, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
To provide a charged particle beam device which enables observation and evaluation of the surface and the inside of a sample with low damage to the sample, the charged particle beam device has: a charged particle beam source; a sample tablein which the sampleis placed; a charged particle beam optical system which pulsates a charged particle beamand irradiates the charged particle beam to the sample at an acceleration voltage within a range of 0 kV to 5 kV; a split distance selectorfor selecting a measurement object of the sample; and a split distance setting unitfor setting a split distance in one line scanning of the charged particle beam on the sample.