The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Feb. 21, 2019
Asml Netherlands B.v., Veldhoven, NL;
Franciscus Johannes Joseph Janssen, Geldrop, NL;
Philippe Jacqueline Johannes Hubertus Anthonius Habets, Maastricht, NL;
Güneş Nakiboğlu, Eindhoven, NL;
Roger Wilhelmus Antonius Henricus Schmitz, Helmond, NL;
Remco Van de Meerendonk, s-Hertogenbosch, NL;
Joris Dominicus Bastiaan Johannes Van den Boom, Veldhoven, NL;
Nicholas Peter Waterson, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus comprising a heat-sensitive device (F); a radiative element (RE), the radiative element in operation generating first electromagnetic radiation (ER), the first radiation propagating towards the heat-sensitive device; and a radiation-shielding device () arranged between the radiative element and the heat-sensitive device such that, in operation, the first radiation impinges on the radiation-shielding device. The radiation-shielding device comprises a first shield element () having a first fluid channel () arranged therein, the first shield element having a first surface () and a second surface (), the first surface being arranged closer to the radiative element than the second surface; and a second shield element () having a second fluid channel () arranged therein, the second shield element having a third surface () and a fourth surface (), the third surface being arranged closer to the radiative element than the fourth surface. The first shield element is arranged closer to the radiative element than the second shield element and the second shield element is arranged closer to the heat-sensitive device than the first shield element, the first shield element and the second shield element spaced apart from each other and the second surface and the third surface opposing each other.