The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Jan. 16, 2019
Applicant:
Formfactor Beaverton, Inc., Beaverton, OR (US);
Inventors:
Joseph George Frankel, Beaverton, OR (US);
Koby L. Duckworth, Newberg, OR (US);
Kazuki Negishi, Hillsboro, OR (US);
Assignee:
FormFactor Beaverton, Inc., Beaverton, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/08 (2006.01); G01R 1/067 (2006.01);
U.S. Cl.
CPC ...
G01R 1/08 (2013.01); G01R 1/06727 (2013.01); H01L 2224/81121 (2013.01);
Abstract
Probes with fiducial targets, probe systems including the same, and associated methods. The probes include a probe body, a probe beam, a probe tip configured to contact a device under test (DUT), and a fiducial target affixed to the probe beam. The fiducial target is configured to be visible to an optical system to determine a position of the probe tip relative to the DUT. The methods include methods of utilizing and/or manufacturing the probes.