The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Aug. 06, 2019
Novellus Systems, Inc., San Jose, CA (US);
Edward J. Augustyniak, Tualatin, OR (US);
Douglas Keil, West Linn, OR (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A controller for a substrate processing chamber includes a film thickness estimating module configured to while a first RF power is provided to generate plasma in the substrate processing chamber, receive a first measurement of a second RF power supplied to a probe, receive a second measurement of a DC self-bias voltage associated with the probe, wherein the second measurement is indicative of a thickness of a film deposited within the substrate processing chamber, and calculate a thickness of the film using the first measurement of the second RF power and the second measurement of the DC self-bias voltage. An operating parameter adjustment module is configured to adjust at least one operating parameter of the substrate processing chamber based on the thickness of the film as calculated by the film thickness estimating module.