The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2020

Filed:

Nov. 07, 2019
Applicant:

National Taiwan Normal University, Taipei, TW;

Inventor:

Chun-Hu Cheng, Taipei, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 27/11597 (2017.01); H01L 29/78 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/516 (2013.01); H01L 27/11597 (2013.01); H01L 29/4234 (2013.01); H01L 29/78391 (2014.09);
Abstract

A storage memory device includes a vertical field effect transistor including a semiconductor substrate; a pillar extending upwardly from the substrate and containing a source, a drain, and a channel disposed therebetween; a first insulating layer surrounding the channel; a stacked structure surrounding the first insulating layer; and a gate unit. The stacked structure includes a charge trapping layer and a composite element. The composite element includes a ferroelectric layer made of a doped hafnium oxide-based material that has a predominantly orthorhombic phase and exhibits a negative capacitance; and an antiferroelectric layer made of a zirconium oxide-based material that has a predominantly tetragonal phase.


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