The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Feb. 03, 2017
Entegris, Inc., Billerica, MA (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Colton J. Harr, Colorado Springs, CO (US);
Matthew A. Fuller, Colorado Springs, CO (US);
Colton J. Harr, Colorado Springs, CO (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
A substrate retainer () is provided which presents a substantially uniform contact face () that can accommodate a large variation in the location of substrate registration thereon. The uniform contact face () is allowed to deflect and compress in order to eliminates the prospect of substrates () being damaged by or becoming inadvertently pinched within the substrate retainer () or from being pressed too hard by the uniform contact face (). With this arrangement, no adhesives or tapes are utilized, so there is no attendant out gassing of volatile organic compounds to contaminate the microenvironment, or complications due to incompatibility of such adhesives and tapes with washing processes.