The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Nov. 21, 2017
Entegris, Inc., Billerica, MA (US);
Sangbum Han, Seoul, KR;
Seobong Chang, Gyeonggi-do, KR;
Jaeeon Park, HwaSeong, KR;
Bryan Clark Hendrix, Danbury, CT (US);
Thomas H. Baum, New Fairfield, CT (US);
Entegris, Inc., Billerica, MA (US);
Abstract
The present disclosure relates to a bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors, and ultra high purity versions thereof, methods of making, and methods of using these bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors in a vapor deposition process. One aspect of the disclosure relates to an ultrahigh purity bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursor of the formula Co(CO)(RC≡CR), where Rand Rare different organic moieties and Ris more electronegative or more electron withdrawing compared to R.