The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Nov. 21, 2019
Asml Netherlands B.v., Veldhoven, NL;
Thomas Poiesz, Veldhoven, NL;
Bert Dirk Scholten, Best, NL;
Dirk Willem Harberts, Eindhoven, NL;
Lucas Henricus Johannes Stevens, Eindhoven, NL;
Laura Maria Fernandez Diaz, Eindhoven, NL;
Johannes Adrianus Cornelis Maria Pijnenburg, Moergestel, NL;
Abraham Alexander Soethoudt, Eindhoven, NL;
Wilhelmus Jacobus Johannes Welters, Weert, NL;
Jimmy Matheus Wilhelmus Van De Winkel, Kessel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate table for an immersion system having a projection system arranged to project an image onto a substrate and a liquid confinement system configured to confine an immersion liquid to a space between the projection system and the substrate, the substrate table including: a substrate holder configured to hold a substrate; and a current control device arranged to reduce an electric current flowing between the substrate and the substrate holder while the immersion liquid is confined to the space.