The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2020
Filed:
Feb. 01, 2018
Tokyo Electron Limited, Tokyo, JP;
Tetsuya Kagami, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An inspection system includes a plurality of prober units each configured to bring probes of a probe card into contact with devices formed on a substrate on a stage, and a tester configured to apply electrical signals to the devices on the substrate through the probe card to inspect electrical characteristics of the devices. The plurality of prober units are arranged such that a plurality of units each of which has the prober units stacked in multiple stages are arranged in multiple rows in a horizontal direction, and at least one test unit constituting a main part of the tester is arranged to a side of a predetermined prober unit among the plurality of prober units.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile