The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2020

Filed:

Apr. 04, 2018
Applicant:

Tanaka Kikinzoku Kogyo K.k., Tokyo, JP;

Inventors:

Toshinori Ogashiwa, Hiratsuka, JP;

Yuya Sasaki, Hiratsuka, JP;

Masayuki Miyairi, Hiratsuka, JP;

Kenichi Inoue, Hiratsuka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B22F 7/04 (2006.01); B22F 3/24 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); H01L 21/50 (2006.01); H01L 23/10 (2006.01);
U.S. Cl.
CPC ...
B22F 7/04 (2013.01); B22F 3/24 (2013.01); B81B 7/0041 (2013.01); B81C 1/00293 (2013.01); H01L 21/50 (2013.01); H01L 23/10 (2013.01); B81C 2203/0145 (2013.01);
Abstract

A sealing structure with a surface of a base material with a through-hole, an underlying metal film, and a sealing member bonded to the underlying metal film to seal the through-hole. The sealing member includes a compressed product of a metal powder including gold having a purity of 99.9% by mass or more and a lid-like metal film including a bulk-like metal including gold and having a thickness of not less than 0.01 μm and not more than 5 μm. The sealing material includes an outer periphery-side densified region in contact with an underlying metal film and a center-side porous region in contact with the through-hole. The shape of pores in the densified region is specified, and the horizontal length (l) of a pore in the radial direction at any cross-section of the densified region and the width (W) of the densified region satisfy the relationship of l≤0.1W.


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