The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Jun. 20, 2019
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Meng-Han Tsai, Yunlin County, TW;

Yi-Chen Wang, Taichung, TW;

Kuan-Chih Chen, New Taipei, TW;

Kuang-Wen Liu, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/3213 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5226 (2013.01); H01L 21/32136 (2013.01); H01L 21/76802 (2013.01); H01L 21/76877 (2013.01); H01L 23/53228 (2013.01);
Abstract

The semiconductor structure includes a semiconductor device, a first metallization layer on the semiconductor device, a second metallization layer on the first metallization layer, and a third dielectric layer between the first metallization layer and the second metallization layer. The first metallization layer includes a first dielectric layer and a first metal layer disposed in the first dielectric layer, wherein the first metal layer has a first thickness, and the first metal layer comprises copper. The third dielectric layer has a second thickness, and a ratio of the second thickness of the third dielectric layer to the first thickness of the first metal layer is ranged from about 3 to about 20.


Find Patent Forward Citations

Loading…