The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Sep. 14, 2017
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Takashi Nagamine, Kawasaki, JP;
Tsuyoshi Nakamura, Incheon, KR;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki, JP;
Abstract
A resist composition including a polymeric compound having a structural unit represented by formula (a0-1) and an acid generator consisting of a compound represented by general formula (b1-1) in which Rarepresents an acid dissociable group represented by general formula (a0-r1-1); Ra, Ra, Ra, Raand Rarepresent a hydrocarbon; Yarepresents a quaternary carbon atom; Rrepresents a hydrocarbon group having at least 1 hydroxy group as a substituent; Yrepresents a single bond or a divalent linking group containing an oxygen atom; and Vrepresents a single bond, an alkylene group or a fluorinated alkylene group).