The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
Aug. 08, 2018
Gigaphoton Inc., Tochigi, JP;
Hideyuki Hayashi, Oyama, JP;
Takeshi Okamoto, Oyama, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
A droplet timing sensor that detects droplet passage timing by receiving a light from a light source unit with which a droplet is irradiated in an extreme ultraviolet light generating apparatus eliminates an influence of droplet passage on light source control for obtaining a constant light income. The droplet timing sensor includes: a light source unit configured to irradiate a droplet with an illumination light at a predetermined position; a light receiving unit () configured to receive the illumination light having passed through the predetermined position and detect a change in a light income; and a light source controller () configured to obtain a frequency distribution of light incomes measured multiple times with time using a statistical processing unit (), and control an output of the light source unit based on a light income at maximum frequency.