The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2020

Filed:

Jul. 04, 2016
Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, JP;

Inventors:

Tsutomu Hori, Itami, JP;

Hironori Itoh, Itami, JP;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 29/36 (2006.01); C30B 25/18 (2006.01); C30B 25/20 (2006.01); H01L 21/04 (2006.01); H01L 21/78 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 29/739 (2006.01); H01L 29/745 (2006.01);
U.S. Cl.
CPC ...
C30B 29/36 (2013.01); C30B 25/183 (2013.01); C30B 25/20 (2013.01); H01L 21/0262 (2013.01); H01L 21/02236 (2013.01); H01L 21/02378 (2013.01); H01L 21/02433 (2013.01); H01L 21/02447 (2013.01); H01L 21/02529 (2013.01); H01L 21/02576 (2013.01); H01L 21/02609 (2013.01); H01L 21/046 (2013.01); H01L 21/049 (2013.01); H01L 21/0485 (2013.01); H01L 21/78 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01); H01L 29/7802 (2013.01); H01L 21/02634 (2013.01); H01L 29/0878 (2013.01); H01L 29/7395 (2013.01); H01L 29/7455 (2013.01);
Abstract

A silicon carbide epitaxial substrate has a silicon carbide single-crystal substrate and a silicon carbide layer. A first ratio of an absolute value of a difference between a dopant density in a first end region and a dopant density in a central region to an average value of the dopant density in the first end region and the dopant density in the central region is not more than 40%. A second ratio of an absolute value of a difference between a dopant density in a second end region and the dopant density in the central region to an average value of the dopant density in the second end region and the dopant density in the central region is not more than 40%.


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